High precision atmospheric greenhouse gas CO2/CH4/H2The O analyzer is a real-time trace gas monitoring instrument that measures these gases with sensitivity in the ppb range. This analyzer is based on off-axis integrated cavity absorption spectroscopy combined with noise source technology, using near-infrared laser to measure the spectral characteristics of molecules in real time. The gas is circulated in the optical measurement chamber by the laser, with an effective path length of up to 20 kilometers, and the absorption is effectively enhanced, making it possible to measure the concentration of ultra trace gases. Therefore, the analyzer maintains high linearity, accuracy, and precision under changing environmental conditions with minimal calibration. The temperature and pressure control system of the high-precision integration chamber ensures measurement accuracy for a long period of time. High precision atmospheric greenhouse gas CO2/CH4/H2The O analyzer mainly consists of an optical subsystem and an electrical subsystem, where the optical subsystem includes but is not limited to: optical resonant cavity, laser, high reflectivity mirror, and photodiode.